Product Center
Product Center
APC/R2R
Advanced Process Control/Run To Run
Product Overview
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Emergence of APCTrajectory of semiconductor industry towards shrinking chip sizes, growth of industry integration and increasing wafer size. -
Improvement and StrengtheningProduct yield, rework rate, and productivity -
Achieve "Win-win" between process quality and capacity
Intelligent tools and rich application scenarios
Features
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01—Reduce the use of pilot wafer—
With accurate feedback, the output value can come close to the target value within the shortest time so the use of pilot wafer can be reduced significantly.
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02—Improve Product Cpk—
APC can effectively control the product around the target value, ensuring the product quality
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03—Reduce the Incidence of OOS—
Taking all the possible factors into full account in the algorithm, the occurrence of outliner can be effectively reduced.
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04—Reduce the Incidence of MO—
Through integral system operation, the chances of personnel operation required can be reduced substantially, coupled with the guard control of the compensation value in the system, the occurrence of MO will be reduced.
Advantage Effect
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Virtual Measurement
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Equipment Health Monitoring
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Image Defect Diagnosis
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