Product Center
Product Center
DMS
Defect Management System
Product Overview
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DMS is a defect improvement and management systemAnalyze the defect distribution and pattern more efficiently -
Designed for wafer defects with coordinatesProcess and convert defect data of the semiconductor factory to generate a clear and intuitive defect distribution map -
Flexibility and scalableIt can be integrated with modules such as EDA and YMS to realize multi-angle and multi-level defect data analysis.
Intelligent tools and rich application scenarios
Features
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01—Defect Query—
Be able to query and edit defect data, and analyse different sets of defect data which can be freely selected.
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02—Map display—
Convert the defect points into a defect map according to the coordinates so that users can quickly view the defect distribution of each product.
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03—Map Stack—
Stack defect maps of different products together to quickly analyze the high-incidence defect locations and defect aggregation patterns, then compare them with the equipment coordinates.
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04—Defect History Analysis—
Compare the coordinates of the same product in different stages, so as to distinguish and trace the causes of defects and then analyze the causes.
Advantage Effect
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Match the defect coordinates, quickly analyze the increase and decrease of defects and trace back
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Stack the defect map and quickly analyze the defect distribution rule.
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Quick view of the product defect map and product defect statistics.
Solution
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