Product Center
Product Center
PRMS
Photoresist Management System
Product Overview
-
Frequent Replacement of PhotoresistIncreasing capacity requirements, limitations of equipment capabilities and limited number of shopfloor control rooms, jointly tend to impose many restrictions on equipment. -
Over-Reliance on ManualRegarding the previous photoresist replacement management, whether it is through hand-written form or barcode system, they still rely on manual operations. -
PRMS systemThrough the control mechanism and design, the waste of expired photoresist or, the risk of human error by personnel replacing the photoresist, can be effectively avoided.
Intelligent tools and rich application scenarios
Features
-
01—Identical HW/SW—
Independently developed system, with high customization capability.
-
02—Big Data Analysis—
The use of big data analysis management, combined with inline defect analysis system make it possible to quickly find the real causes.
-
03—MO prevention —
Using RFID timing and positioning technologies, the risk of human error can be effectively prevented.
-
04—Cost Reduction—
Through the meticulously-designed system, photoresist can be used effectively, preventing the occurrence of waste due to expiration or negligence.
Advantage Effect
-
Virtual measurement
-
Equipment Health Monitoring
-
Image Defect Diagnosis
G
U
I
D
E
