Through the control mechanism and design, the waste of expired photoresist or, the risk of human error by personnel replacing the photoresist, can be effectively avoided.
Independently developed system, with high customization capability.
The use of big data analysis management, combined with inline defect analysis system make it possible to quickly find the real causes.
Using RFID timing and positioning technologies, the risk of human error can be effectively prevented.
Through the meticulously-designed system, photoresist can be used effectively, preventing the occurrence of waste due to expiration or negligence.